The QUASES-Tougaard method builds on the fact that the XPS peak shape depends on the surface structure of the solid on the nano-meter depth scale. By analyzing the peak shape of measured spectra, the quantitative composition of the surface can therefore readily be determined. The method is non-destructive and therefore allows also to study the change in morphology of a surface nano-structure during surface treatment as e.g. chemical reaction, annealing etc.
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